●Resist Development Analyzer RDA series

RDA-760 / RDA-790 / RDA-800 / RDA-QZ3

●Photo Process Analyzer/Exposure System
UVES-2000 / VUVES-4500 / EUVES-7000

●Resist Evaluation Tool
PAGA-100 / LTNIP-5000

●Automatic Resist Coater/Developer/Bake System LITHOTRAC series
CB-50/ DB-50 / Dual-1000

●Manual Bake/Cooling System LWB series
LWB-03 / LWB-03P / APPS-30 / APPS-40

●Manual Resist Coater/Developer Litho Spin Cup series
LSC-800C / LSC-800D / LSC-QZ1 / LSC-400C / LSC-400D