Film thickness measurement equipment

Film thickness measurement equipment
Contact to Foothill Instruments directly

  • KV-300
  • KF-10
  • L-2

Spectroscopic ellipsometer

  • UNECS-2000/UNECS-3000

Si wafer thickness measurement equipment
Si-71

  • Foothill Si-71

EUV light source

EUV light source Contact to Energetiq Technology directly

  • EQ-10M、EQ-10HP

LDLS (Laser Driven Light Source)
Contact to Energetiq Technology directly

LDLS (Laser Driven Light Source)
Energetiq Technology

  • EQ-99X
  • EQ-99XFC
  • EQ-9, EQ-77, EQ-400