Simulator

Virtual Lithography Simulator°°

Simulation tools are approximations of the real world and are essential for research, development, and production related to lithography. Litho Tech Japan offers the following product line of simulators.

Lithography Simulator -Real Virtual Patterning-

PROLITH X6

Overview

Lithography simulator allows to calculate the developed photo-resist shape by visualizing the imaging by exposure optical system and the process of development and photosensitive of photo-resist on the computer by each numerical calculation. Lithography simulators are essential for research, development, and production related to lithography.

Link to

Resist Profile

Process Window

Aerial Image


Click to open expanded view.



Process Window Analysis

ProDATA

Overview

ProDATA quickly and easily analyzes existing data, including contrast curves, swing curves, and focus exposure matrix (FEM) for measured and simulated data. It is possible to decide the process based on the analyzed results.

Link to

Process Window

EL vs. DOF


Click to open expanded view.