Coater & Developer
Manual HMDS baking equipment APPS series
The APPS series products are manual HMDS baking equipment in which vaporized hexamethyldisilazane (HMDS) is supplied to the surface of a silicon wafer or quartz substrate for high temperature reactions. After the wafer is set manually, the HMDS baking proceeds automatically.
HMDS reacts with hydroxyl groups on the surface of the substrate such as silicon wafer, induced by the thermal energy of the bake plate, making the surface hydrophobic and suppressing resist peeling during development.
HMDS reacts with hydroxyl groups on the surface of the substrate such as silicon wafer, induced by the thermal energy of the bake plate, making the surface hydrophobic and suppressing resist peeling during development.
APPS-30
The APPS-30 is a single-wafer manual HMDS baking equipment that supplies the vaporized hexamethyldisilazane (HMDS) to the surface of a silicon wafer or quartz substrate of up to 300 mm for heat induced reactions. A loader is provided to load the substrate on the bake plate and ensure safety.
APPS-40
The APPS-40 is batch-type manual HMDS baking equipment that supports up to 25 slots and 8-inch wafer cassettes.
It consists of a vacuum bake oven and an HMDS supply system, and the process flow is programmable.
It consists of a vacuum bake oven and an HMDS supply system, and the process flow is programmable.
